EECE7244 (Introduction to Microelectromechanical Systems (MEMS)) course reviews and ratings at Northeastern (NEU). Compare professors with RateMyProfessor reviews.
Introduces microelectromechanical systems, including principles of sensing and actuation, microfabrication technology for MEMS, noise concepts, and packaging techniques. Covers a wide range of disciplines, from electronics to mechanics, material properties, microfabrication technology, electromagnetics, and optics. Studies several classes of devices including inertial measurement devices, pressure sensors, rf components, and optical MEMS. Devotes the last third of the semester largely to projects involving design of MEMS devices to specifications in a realistic fabrication process.
Data updated October 2026.